Mechanical Engineering

Indian Institute of Technology Kanpur

ME672A
Micromanufacturing Processes
Credits:
(3-0-0-9)
Contents:

(Numbers within parentheses give number of lectures for each topic)

Lecturewise Breakup

Part-1: Introduction [3 Lectures]

  • Introduction to the Course & Classification of Micromanufacturing Processess [2 lectures]
  • Challenges in Meso-, Micro-, and Nanomanufacturing [1 lecture]

Part-2: Introduction to Traditional and Advanced Micromachining Processes [9 Lectures]

  • Microturning [1 lecture]
  • Micromilling [1 lecture]
  • Microgrinding [1 lecture]
  • Biomachining [1 lecture]
  • Micro- and Nano-manufacturing by Focused Ion Beam [2 lectures]
  • Electric discharge micromachining [1 lecture]
  • Electrochemical micromachining [1 lecture]
  • Abrasive water jet micromachining [1 lecture]

Part-3: Nanofinishing [7 Lectures]

  • Magnetorheological and Allied Finishing Processes and their theoretical analysis [3 lectures]
  • Theoretical Analysis of Abrasive Flow Finishing (AFF) for Micromanufacturing [2 lectures]
  • An Integrated Wafer Surface Evolution Model for Chemical Mechanical Planarization (CMP) [2 Lectures]

Part-4: Microjoining [5 Lectures]

  • Introduction to microjoining [1 lecture]
  • Laser Microwelding [2 lectures]
  • Electron Beams Microwelding and Applications [2 lectures]

Part-5: Microforming [6 Lectures]

  • Introduction to Microforming [1 lecture]
  • Micro- and Nanostructured Surface Development by Nano Plastic Forming and Roller imprinting [2 lectures] 19. Microextrusion [2 lectures]
  • 20. Microbending with Laser [1 lecture]

Part-6: Microcasting and Micromolding [8 Lectures]

  • Microcasting [4 lectures]
  • Micromolding – A soft Lithography Technique [2 lectures]
  • Fabrication of Microelectronic Devices [2 lectures]

Part-7: Miscellaneous topics [5 Lectures]

  • Dimensional Metrology for Micro/Mesoscale Manufacturing [4 lectures]
  • Generalised applications [1 lecture]

Total Lecture = 43

Reference Texts:
  1. Micromanufacturing, V. K. Jain (Ed.), CRC press, 2012.
  2. Micromanufacturing & Nanotechnology, N. P. Mahalik, Springer.
  3. Microfacbrication & Nanomanufacturing, Mark J. Jackson, CRC press.
  4. Introduction to Micromachining, V. K. Jain (Ed.), Narosa publisher, 2010.
  5. Related Research papers