Basically,this system is used for ablation of multifunctional oxide materials for its thin film deposition,which is a physical vapor deposition(PVD)technique.Its applied energy density is of maximum 5 J/cm^2.Thin film thickness and its properties can be tuned by Laser pulse energy and frequency,Oxygen Partial pressure,Deposition and Annealing temperature,Target to substrate distance and on substrate property.
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List of research areas where it can be usefulGenerally, it is used for various types of thin film deposition techniques.
Pulsed Laser Deposition,Thin films,PVD
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Western Labs Extension 105
Monday to Friday; from 8am to 5pm
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Prorf. Ashish Garg
Department of MSE Indian Institute of Technology Kanpur Kanpur-208016 India Tel: +91 512 2597904 (Off) Email- This email address is being protected from spambots. You need JavaScript enabled to view it.
WL-104,
MSE Dept., IIT Kanpur, Kanpur UP-208016 Tel: +91 512 2597904(Lab)
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